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A Calibration Method for the Higher Modes of a Micro-mechanical Cantilever

Research output: Contribution to journalArticle

Original languageEnglish
Article number223101
Number of pages4
JournalApplied Physics Letters
Volume110
Issue number22
Early online date30 May 2017
DOIs
DateAccepted/In press - 15 May 2017
DateE-pub ahead of print - 30 May 2017
DatePublished (current) - May 2017

Abstract

Micro-mechanical cantilevers are increasingly being used as a characterisation tool in both material and biological sciences. New non-destructive applications are being developed that rely on the information encoded within the cantilever’s higher oscillatory modes, such as AFM techniques that measure non-topographic properties of a sample. However, these methods require the spring constants of the cantilever at higher modes to be known in order to quantify their results. Here, we show how to calibrate the micro-mechanical cantilever and find the effective spring constant of any mode. The method is uncomplicated to implement, using only properties of the cantilever and the fundamental mode that are straightforward to measure.

    Research areas

  • MEMS, AFM, Atomic Force Microscope, Cantilevers, Calibration, Higher Modes, Multifrequency, Non-Topography

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  • Full-text PDF (accepted author manuscript)

    Rights statement: This is the author accepted manuscript (AAM). The final published version (version of record) is available online via AIP at http://aip.scitation.org/doi/10.1063/1.4984222. Please refer to any applicable terms of use of the publisher.

    Accepted author manuscript, 355 KB, PDF-document

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