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Combined spatially resolved optical emission imaging and modeling studies of microwave-activated H2/Ar and H2/Kr plasmas operating at powers and pressures relevant for diamond chemical vapor deposition

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)2544-2558
JournalJournal of Physical Chemistry A
Early online date11 Mar 2019
DateSubmitted - 2019
DateAccepted/In press - 11 Mar 2019
DateE-pub ahead of print - 11 Mar 2019
DatePublished (current) - 4 Apr 2019



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