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What [plasma used for growing] diamond can shine like flame?

Research output: Contribution to journalReview article

Original languageEnglish
Pages (from-to)10482-10495
Number of pages14
JournalChemical Communications
Volume53
Early online date20 Aug 2017
DOIs
DateAccepted/In press - 17 Aug 2017
DateE-pub ahead of print - 20 Aug 2017
DatePublished (current) - 21 Sep 2017

Abstract

Diamond synthesis by chemical vapour deposition (CVD) from carbon-containing gas mixtures has by now long been an industrial reality, but commercial interest and investment into the technology has grown dramatically in the last several years. This Feature Article surveys recent advances in our understanding of the gas-phase chemistry of microwave-activated methane/hydrogen plasmas used for diamond CVD, including that of added boron-, nitrogen- and oxygen-containing dopant species. We conclude by considering some of the remaining challenges in this important area of contemporary materials science.

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  • Full-text PDF (accepted author manuscript)

    Rights statement: This is the author accepted manuscript (AAM). The final published version (version of record) is available online via The Royal Society of Chemistry at http://pubs.rsc.org/en/Content/ArticleLanding/2017/CC/C7CC05568D#!divAbstract. Please refer to any applicable terms of use of the publisher

    Accepted author manuscript, 779 KB, PDF-document

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